•  Provide optimized tool performance and lower cost of ownership (COW) through use of
    Multi Inspection Modes
    High Sensitivity Mode
    High Throughput Mode
    Production Mode

•  Non-Contacted chuck protects inspected production substrate from damage

•  Integrated microscope allows user to confirm and classify defect types and save high resolution defect images for further yield analysis

•  CIM software compatible with all panel manufacture standards

•  Optional functions/features give user additional applications and benefits
    Auto-Defect Classification (ACD)
    Digital Macro-Image (DM)
    CD Overlay
    Periphery inspection
    Yield Enhancement Software (YES)

•  Small footprint saves user clean-room space